@article{2e18db5e13f440aa9d28ca3da653bc42,
title = "Complementary exposure of 70 nm SoC devices in electron projection lithography",
author = "Hiroshi Yamashita and Isao Amemiya and Kunio Takeuchi and Hideki Masaoka and Kimitoshi Takahashi and Akihiro Ikeda and Yukinori Kuroki and Masaki Yamabe",
year = "2003",
doi = "10.1116/1.1622936",
language = "English",
volume = "21",
pages = "2645--2649",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}