Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

Shojiro Komatsu; Daisuke Kazami; Hironori Tanaka; Yoshiki Shimizu; Yusuke Moriyoshi; Masaharu Shiratani; Katsuyuki Okada

doi:10.1063/1.2188381

Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

Shojiro Komatsu, Daisuke Kazami, Hironori Tanaka, Yoshiki Shimizu, Yusuke Moriyoshi, Masaharu Shiratani, Katsuyuki Okada

電子デバイス工学

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

7 被引用数 (Scopus)

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Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.

本文言語	英語
論文番号	151914
ジャーナル	Applied Physics Letters
巻	88
号	15
DOI	https://doi.org/10.1063/1.2188381
出版ステータス	出版済み - 4月 10 2006

!!!All Science Journal Classification (ASJC) codes

物理学および天文学（その他）

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@article{feb28c20f0834c6498453fe43ee3f3b3,

title = "Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst",

abstract = "Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.",

author = "Shojiro Komatsu and Daisuke Kazami and Hironori Tanaka and Yoshiki Shimizu and Yusuke Moriyoshi and Masaharu Shiratani and Katsuyuki Okada",

year = "2006",

month = apr,

day = "10",

doi = "10.1063/1.2188381",

language = "English",

volume = "88",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "15",

}

TY - JOUR

T1 - Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

AU - Komatsu, Shojiro

AU - Kazami, Daisuke

AU - Tanaka, Hironori

AU - Shimizu, Yoshiki

AU - Moriyoshi, Yusuke

AU - Shiratani, Masaharu

AU - Okada, Katsuyuki

PY - 2006/4/10

Y1 - 2006/4/10

N2 - Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.

AB - Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.

UR - http://www.scopus.com/inward/record.url?scp=33646161926&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33646161926&partnerID=8YFLogxK

U2 - 10.1063/1.2188381

DO - 10.1063/1.2188381

M3 - Article

AN - SCOPUS:33646161926

SN - 0003-6951

VL - 88

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 15

M1 - 151914

ER -

Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

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!!!All Science Journal Classification (ASJC) codes

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