Batch fabrication of force sensors for robotic surgery using optical interference

This paper aims to present a novel method for batch fabrication of miniature force sensors using optical interference with Microelectromechanical Systems technology. Previously, we noted that the batch fabrication of miniature force sensors was difficult because they were fabricated one by one using individual parts. Therefore, the present study proposes a new method for batch fabrication in a single batch, in which force sensors are assembled side-by-side. Furthermore, we demonstrate the performance and effectiveness of the proposed batch fabrication method to fabricate force sensors.