TY - JOUR
T1 - Batch fabrication of force sensors for robotic surgery using optical interference
AU - Kashimura, Yuki
AU - Tsuroka, Noriko
AU - Arata, Jumpei
AU - Haga, Yoichi
N1 - Publisher Copyright:
© 2023 Elsevier B.V.
PY - 2023/11/1
Y1 - 2023/11/1
N2 - This paper aims to present a novel method for batch fabrication of miniature force sensors using optical interference with Microelectromechanical Systems technology. Previously, we noted that the batch fabrication of miniature force sensors was difficult because they were fabricated one by one using individual parts. Therefore, the present study proposes a new method for batch fabrication in a single batch, in which force sensors are assembled side-by-side. Furthermore, we demonstrate the performance and effectiveness of the proposed batch fabrication method to fabricate force sensors.
AB - This paper aims to present a novel method for batch fabrication of miniature force sensors using optical interference with Microelectromechanical Systems technology. Previously, we noted that the batch fabrication of miniature force sensors was difficult because they were fabricated one by one using individual parts. Therefore, the present study proposes a new method for batch fabrication in a single batch, in which force sensors are assembled side-by-side. Furthermore, we demonstrate the performance and effectiveness of the proposed batch fabrication method to fabricate force sensors.
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U2 - 10.1016/j.sna.2023.114672
DO - 10.1016/j.sna.2023.114672
M3 - Article
AN - SCOPUS:85172207797
SN - 0924-4247
VL - 362
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
M1 - 114672
ER -