Analytical calculation for estimation of magnetic film properties for a 3-GHz thin film inductor

Terumitsu Tanaka; Yang Ki Hong; Sung Hoon Gee; Mun Hyoun Park; Dustin W. Erickson; Chongwor Byun

doi:10.1109/TMAG.2004.832251

Analytical calculation for estimation of magnetic film properties for a 3-GHz thin film inductor

Terumitsu Tanaka, Yang Ki Hong, Sung Hoon Gee, Mun Hyoun Park, Dustin W. Erickson, Chongwor Byun

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

6 被引用数 (Scopus)

抄録

Thickness, resistivity, and the Gilbert damping constant are estimated using Maxwell and Landau-Lifshitz-Gilbert (LLG) equations to meet operating parameters of ferromagnetic thin film inductors in the gigahertz frequency range. The following properties of soft magnetic film are calculated to satisfy a quality factor of 10 at 3 GHz: 4πM_S = 21.3 kG: H_k - 215 Oe; and μ′_dc = 100. The complex permeability was not influenced by film thickness up to 100 nm. Operation frequency increases with the increase of electrical resistivity and decrease of film thickness. The Gilbert damping constant is found to have a significant effect on the operation frequency. The quality factor can be retained up to 3 GHz for 100-nm-thick film with a damping constant of 0.015 when resistivity is greater than 50 μΩ · cm.

本文言語	英語
ページ（範囲）	2005-2007
ページ数	3
ジャーナル	IEEE Transactions on Magnetics
巻	40
号	4 II
DOI	https://doi.org/10.1109/TMAG.2004.832251
出版ステータス	出版済み - 7月 2004
外部発表	はい

!!!All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
電子工学および電気工学

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10.1109/TMAG.2004.832251

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title = "Analytical calculation for estimation of magnetic film properties for a 3-GHz thin film inductor",

abstract = "Thickness, resistivity, and the Gilbert damping constant are estimated using Maxwell and Landau-Lifshitz-Gilbert (LLG) equations to meet operating parameters of ferromagnetic thin film inductors in the gigahertz frequency range. The following properties of soft magnetic film are calculated to satisfy a quality factor of 10 at 3 GHz: 4πMS = 21.3 kG: Hk - 215 Oe; and μ′dc = 100. The complex permeability was not influenced by film thickness up to 100 nm. Operation frequency increases with the increase of electrical resistivity and decrease of film thickness. The Gilbert damping constant is found to have a significant effect on the operation frequency. The quality factor can be retained up to 3 GHz for 100-nm-thick film with a damping constant of 0.015 when resistivity is greater than 50 μΩ · cm.",

author = "Terumitsu Tanaka and Hong, {Yang Ki} and Gee, {Sung Hoon} and Park, {Mun Hyoun} and Erickson, {Dustin W.} and Chongwor Byun",

note = "Funding Information: Manuscript received February 17, 2004. This work was supported by the Office of Naval Research under Grant N00014-03-1-0819. The authors are with the Department of Materials Science and Engineering, University of Idaho, Moscow, ID 83844-3024 USA (e-mail: ykhong@uidaho.edu). Digital Object Identifier 10.1109/TMAG.2004.832251 Fig. 1. Relationship of the dc permeability, saturation magnetization, and anisotropy field for FMR frequencies of 4.0, 5.0, and 6.0 GHz.",

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AU - Erickson, Dustin W.

AU - Byun, Chongwor

N1 - Funding Information: Manuscript received February 17, 2004. This work was supported by the Office of Naval Research under Grant N00014-03-1-0819. The authors are with the Department of Materials Science and Engineering, University of Idaho, Moscow, ID 83844-3024 USA (e-mail: ykhong@uidaho.edu). Digital Object Identifier 10.1109/TMAG.2004.832251 Fig. 1. Relationship of the dc permeability, saturation magnetization, and anisotropy field for FMR frequencies of 4.0, 5.0, and 6.0 GHz.

PY - 2004/7

Y1 - 2004/7

N2 - Thickness, resistivity, and the Gilbert damping constant are estimated using Maxwell and Landau-Lifshitz-Gilbert (LLG) equations to meet operating parameters of ferromagnetic thin film inductors in the gigahertz frequency range. The following properties of soft magnetic film are calculated to satisfy a quality factor of 10 at 3 GHz: 4πMS = 21.3 kG: Hk - 215 Oe; and μ′dc = 100. The complex permeability was not influenced by film thickness up to 100 nm. Operation frequency increases with the increase of electrical resistivity and decrease of film thickness. The Gilbert damping constant is found to have a significant effect on the operation frequency. The quality factor can be retained up to 3 GHz for 100-nm-thick film with a damping constant of 0.015 when resistivity is greater than 50 μΩ · cm.

AB - Thickness, resistivity, and the Gilbert damping constant are estimated using Maxwell and Landau-Lifshitz-Gilbert (LLG) equations to meet operating parameters of ferromagnetic thin film inductors in the gigahertz frequency range. The following properties of soft magnetic film are calculated to satisfy a quality factor of 10 at 3 GHz: 4πMS = 21.3 kG: Hk - 215 Oe; and μ′dc = 100. The complex permeability was not influenced by film thickness up to 100 nm. Operation frequency increases with the increase of electrical resistivity and decrease of film thickness. The Gilbert damping constant is found to have a significant effect on the operation frequency. The quality factor can be retained up to 3 GHz for 100-nm-thick film with a damping constant of 0.015 when resistivity is greater than 50 μΩ · cm.

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Analytical calculation for estimation of magnetic film properties for a 3-GHz thin film inductor

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