Takahashi, H.,
Yamashita, Y.,
Tottori, N.,
Sakuma, S. &
Yamanishi, Y.,
2023,
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023. Institute of Electrical and Electronics Engineers Inc.,
p. 271-274 4 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2023-January).
研究成果: 書籍/レポート タイプへの寄稿 › 会議への寄与