TY - GEN
T1 - X-ray transmission characteristics measurement of a polycapillary lens installed in an analytical electron microscope
AU - Takano, Akira
AU - Maehata, Keisuke
AU - Iyomoto, Naoko
AU - Hara, Toru
AU - Mitsuda, Kazuhisa
AU - Yamasaki, Noriko
AU - Tanaka, Keiichi
PY - 2016/3/10
Y1 - 2016/3/10
N2 - An energy dispersive spectrometer with a superconducting transition edge sensor (TES) microcalorimeter mounted on a transmission electron microscope (TEM) has been developed to improve the accuracy of nanoscale material analysis. TES microcalorimeters generally have a sensitive surface area on the order of 100 × 100 μm2. Furthermore, because of the magnetic field generated by the TEM objective lens, a TES microcalorimeter cannot be placed in a TEM column. Therefore, a polycapillary lens is used for collecting X-rays emitted by a TEM specimen on the TES microcalorimeter. The X-ray transmission characteristics of the polycapillary lens typically depend on the geometrical arrangements of the optics and the X-ray energy. Energy spectrum measurements were carried out for X-rays transmitted by a polycapillary lens installed in a TEM for evaluating X-ray transmission characteristics of the optics. Values of the focal spot size and the intensity gain were obtained by analyzing the experimental energy spectra in the energy range of 1.0-14.0 keV.
AB - An energy dispersive spectrometer with a superconducting transition edge sensor (TES) microcalorimeter mounted on a transmission electron microscope (TEM) has been developed to improve the accuracy of nanoscale material analysis. TES microcalorimeters generally have a sensitive surface area on the order of 100 × 100 μm2. Furthermore, because of the magnetic field generated by the TEM objective lens, a TES microcalorimeter cannot be placed in a TEM column. Therefore, a polycapillary lens is used for collecting X-rays emitted by a TEM specimen on the TES microcalorimeter. The X-ray transmission characteristics of the polycapillary lens typically depend on the geometrical arrangements of the optics and the X-ray energy. Energy spectrum measurements were carried out for X-rays transmitted by a polycapillary lens installed in a TEM for evaluating X-ray transmission characteristics of the optics. Values of the focal spot size and the intensity gain were obtained by analyzing the experimental energy spectra in the energy range of 1.0-14.0 keV.
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U2 - 10.1109/NSSMIC.2014.7431068
DO - 10.1109/NSSMIC.2014.7431068
M3 - Conference contribution
AN - SCOPUS:84965081938
T3 - 2014 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2014
BT - 2014 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2014
Y2 - 8 November 2014 through 15 November 2014
ER -