UV-laser ablation spectroscopy in element analysis of solid surface

Yuji Oki, Takayuki Takao, Takumi Nomura, Mitsuo Maeda

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


Laser ablation for the atomic emission spectroscopy of a glass sample is studied using pulsed UV laser systems and the effect of the laser wavelength is investigated. The threshold fluence for ablation is decreased and the detection sensitivity is improved for shorter wavelengths. Furthermore, very thin (less than 1 nm/shot) surface slicing is possible at a wavelength as short as 193 nm. Polymers also show good ablation characteristics. Improvement of sensitivity and spatial resolution by using shorter wavelength laser ablation is discussed for Na detection in a glass sample.

Original languageEnglish
Pages (from-to)242-246
Number of pages5
JournalOptical Review
Issue number4
Publication statusPublished - 1998

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics


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