Two-photon laser-induced fluorescence measurements of absolute atomic hydrogen densities and powder formation in a silane discharge

U. Czarnetzki; K. Miyazaki; T. Kajiwara; K. Muraoka

doi:10.1116/1.578831

Two-photon laser-induced fluorescence measurements of absolute atomic hydrogen densities and powder formation in a silane discharge

U. Czarnetzki, K. Miyazaki, T. Kajiwara, K. Muraoka

Thermal Engineering

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

Absolute and spatially resolved hydrogen densities were measured in a silane radio frequency discharge by two-photon laser induced fluorescence spectroscopy. The excitation wavelength was 205 nm and the observation wavelength was 656 nm (Balmer alpha). Titration in a flow tube reactor was used for calibration of the detection system, enabling for the first time the determination of reliable absolute hydrogen densities in a silane discharge. In addition, spontaneous as well as laser induced powder formation was observed.

Original language	English
Pages (from-to)	831-834
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	12
Issue number	3
DOIs	https://doi.org/10.1116/1.578831
Publication status	Published - May 1994

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "Absolute and spatially resolved hydrogen densities were measured in a silane radio frequency discharge by two-photon laser induced fluorescence spectroscopy. The excitation wavelength was 205 nm and the observation wavelength was 656 nm (Balmer alpha). Titration in a flow tube reactor was used for calibration of the detection system, enabling for the first time the determination of reliable absolute hydrogen densities in a silane discharge. In addition, spontaneous as well as laser induced powder formation was observed.",

author = "U. Czarnetzki and K. Miyazaki and T. Kajiwara and K. Muraoka",

year = "1994",

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AU - Czarnetzki, U.

AU - Miyazaki, K.

AU - Kajiwara, T.

AU - Muraoka, K.

PY - 1994/5

Y1 - 1994/5

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AB - Absolute and spatially resolved hydrogen densities were measured in a silane radio frequency discharge by two-photon laser induced fluorescence spectroscopy. The excitation wavelength was 205 nm and the observation wavelength was 656 nm (Balmer alpha). Titration in a flow tube reactor was used for calibration of the detection system, enabling for the first time the determination of reliable absolute hydrogen densities in a silane discharge. In addition, spontaneous as well as laser induced powder formation was observed.

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Two-photon laser-induced fluorescence measurements of absolute atomic hydrogen densities and powder formation in a silane discharge

Abstract

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