Tunable optical microscanner driven by piezoelectric actuator

Takeshi Kobayashi, Toshihiro Itoh, Renshi Sawada, Ryutaro Maeda

    Research output: Contribution to journalArticlepeer-review

    13 Citations (Scopus)


    In this study, we developed a tunable piezoelectric optical microscanner. The characteristic of the present microscanner is that the Pb(Zr,Ti)O 3 film is formed on the torsion hinges of the scanner and the hinges act as a tuner themselves. DC voltage applied to the tuner varies the resonant frequency of the rotation of the mirror. A laser displacement meter measures the resonant frequencies to be 6457 Hz for no tuning and 6471 Hz for 15 V tuning. The resonant frequency with tuning between 0 and 15 V shows a hysteresis curve. Moreover, tuning between -15 and 15 V results in the butterfly curve of resonant frequency. The scanning angle under resonant actuation at 6457 Hz is decreased from 5.6 to 5.0° by applying a DC voltage of 15 V to the tuner. The result is in good agreement with the displacement of the edge of the mirror measured using the laser displacement meter.

    Original languageEnglish
    Pages (from-to)6429-6432
    Number of pages4
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Issue number9 B
    Publication statusPublished - Sept 20 2007

    All Science Journal Classification (ASJC) codes

    • General Engineering
    • General Physics and Astronomy


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