Treatment of fluorocarbon using nonthermal plasma produced by atmospheric discharge

Nobuya Hayashi; Kazuhiro Yamamoto; Satoshi Ihara; Masaki Kamatani; Saburoh Satoh; Chobei Yamabe

doi:10.1143/jjap.41.5399

Treatment of fluorocarbon using nonthermal plasma produced by atmospheric discharge

Nobuya Hayashi, Kazuhiro Yamamoto, Satoshi Ihara, Masaki Kamatani, Saburoh Satoh, Chobei Yamabe

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A nonthermal plasma produced by the streamer corona discharge at an atmospheric pressure was investigated for the treatment of fluorocarbon. The effective treatment of fluorocarbons was performed by controlling the discharge parameters of the plasma. The decomposition rate of fluorocarbon was investigated by varying (a) discharge modes, (b) dilution gases and (c) discharge characteristics, that is, applied voltage V_A-K of the main discharge gap and its steepness dV_A-K/dt. The maximum decomposition rate of 92% was achieved by the streamer corona discharge.

Original language	English
Pages (from-to)	5399-5403
Number of pages	5
Journal	Japanese Journal of Applied Physics
Volume	41
Issue number	8
DOIs	https://doi.org/10.1143/jjap.41.5399
Publication status	Published - Aug 2002
Externally published	Yes

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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AU - Hayashi, Nobuya

AU - Yamamoto, Kazuhiro

AU - Ihara, Satoshi

AU - Kamatani, Masaki

AU - Satoh, Saburoh

AU - Yamabe, Chobei

PY - 2002/8

Y1 - 2002/8

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AB - A nonthermal plasma produced by the streamer corona discharge at an atmospheric pressure was investigated for the treatment of fluorocarbon. The effective treatment of fluorocarbons was performed by controlling the discharge parameters of the plasma. The decomposition rate of fluorocarbon was investigated by varying (a) discharge modes, (b) dilution gases and (c) discharge characteristics, that is, applied voltage VA-K of the main discharge gap and its steepness dVA-K/dt. The maximum decomposition rate of 92% was achieved by the streamer corona discharge.

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JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

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Treatment of fluorocarbon using nonthermal plasma produced by atmospheric discharge

Abstract

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