Transmission electron diffraction analysis of crystallographic orientation of β-FeSi2 produced by sputtering on Si(001) substrate

Noriyuki Kuwano; Daigo Norizumi; Tomohiro Fukuyama; Masaru Itakura

doi:10.1143/JJAP.42.86

Transmission electron diffraction analysis of crystallographic orientation of β-FeSi₂ produced by sputtering on Si(001) substrate

Noriyuki Kuwano, Daigo Norizumi, Tomohiro Fukuyama, Masaru Itakura

Materials Physics and Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A practical procedure to distinguish b- and c-axes of β-FeSi₂ by a conventional transmission electron diffraction (TED) method has been demonstrated using β-FeSi₂ formed on a Si substrate. The TED patterns for β-FeSi₂ with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.

Original language	English
Pages (from-to)	86-87
Number of pages	2
Journal	Japanese Journal of Applied Physics
Volume	42
Issue number	1
DOIs	https://doi.org/10.1143/JJAP.42.86
Publication status	Published - Jan 2003

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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abstract = "A practical procedure to distinguish b- and c-axes of β-FeSi2 by a conventional transmission electron diffraction (TED) method has been demonstrated using β-FeSi2 formed on a Si substrate. The TED patterns for β-FeSi2 with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.",

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AU - Fukuyama, Tomohiro

AU - Itakura, Masaru

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AB - A practical procedure to distinguish b- and c-axes of β-FeSi2 by a conventional transmission electron diffraction (TED) method has been demonstrated using β-FeSi2 formed on a Si substrate. The TED patterns for β-FeSi2 with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.

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Transmission electron diffraction analysis of crystallographic orientation of β-FeSi₂ produced by sputtering on Si(001) substrate

Abstract

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