Transient reflecting grating for sub-surface analysis: GHz ultrasonic and thermal spectroscopies and imaging

T. Sawada, A. Harata

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

Picosecond time-resolved Transient Reflecting Grating (TRG) measurements are demonstrated for GHz ultrasonic and thermal spectroscopies of thin films and sub-surface regions of sub-μm scale. The measurements should be tools for electrochemical interface monitoring and time-resolved imaging. Some results are presented to show ion-implantation-induced surface hardening and unusual heat-diffusion behavior near a silicon surface. A model describing potential dependence of TRG responses at an electrochemical interface is proposed. An image of photoexcited carrier density is compared with a thermal image for a He-ion-implanted silicon wafer to demonstrate the time-resolved imaging.

Original languageEnglish
Pages (from-to)263-268
Number of pages6
JournalApplied Physics A Materials Science & Processing
Volume61
Issue number3
DOIs
Publication statusPublished - Sept 1995
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)

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