Towards high-mobility In2xGa2–2xO3 nanowire field-effect transistors

Ziyao Zhou, Changyong Lan, Sen Po Yip, Renjie Wei, Dapan Li, Lei Shu, Johnny C. Ho

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)


Recently, owing to the excellent electrical and optical properties, n-type In2O3 nanowires (NWs) have attracted tremendous attention for application in memory devices, solar cells, and ultra-violet photodetectors. However, the relatively low electron mobility of In2O3 NWs grown by chemical vapor deposition (CVD) has limited their further utilization. In this study, utilizing in-situ Ga alloying, highly crystalline, uniform, and thin In2xGa2−2xO3 NWs with diameters down to 30 nm were successfully prepared via ambient-pressure CVD. Introducing an optimal amount of Ga (10 at.%) into the In2O3 lattice was found to effectively enhance the crystal quality and reduce the number of oxygen vacancies in the NWs. A further increase in the Ga concentration adversely induced the formation of a resistive β-Ga2O3 phase, thereby deteriorating the electrical properties of the NWs. Importantly, when configured into global back-gated NW field-effect transistors, the optimized In1.8Ga0.2O3 NWs exhibit significantly enhanced electron mobility reaching up to 750 cm2·V–1·s–1 as compared with that of the pure In2O3 NW, which can be attributed to the reduction in the number of oxygen vacancies and ionized impurity scattering centers. Highly ordered NW parallel arrayed devices were also fabricated to demonstrate the versatility and potency of these NWs for next-generation, large-scale, and high-performance nanoelectronics, sensors, etc. [Figure not available: see fulltext.].

Original languageEnglish
Pages (from-to)5935-5945
Number of pages11
JournalNano Research
Issue number11
Publication statusPublished - Nov 1 2018
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Electrical and Electronic Engineering


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