Three-dimensionally assembled TES X-ray microcalorimeter arrays for a TEM EDS system

Three-dimensionally assembled TES X-ray microcalorimeter arrays may be utilized for three purposes: (1) to obtain wide X-ray energy coverage of TES microcalorimeters, (2) to distinguish charged particle events from X-ray events, (3) to reconstruct Compton-scattering geometry for hard X-ray Compton cameras. We have designed and fabricated three-dimensionally assembled array of the minimum format i.e. 2 × 2 × 2 array in order to obtain a good energy resolution in a wide energy range of 0.5-20 keV and a high maximum counting rate of 2000 cps for energy dispersive X-ray spectrometer (EDS) system for a transmission electron microscope (TEM). Although we could not obtain required energy resolution because of a problem in the refrigerator system, we confirmed the operation of the three-dimensional array.