Three-dimensionally assembled TES X-ray microcalorimeter arrays for a TEM EDS system

Kenichiro Nagayoshi, Kazuhiro Sakai, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Yoh Takei, Keisuke Maehata, Naoko Iyomoto, Shohei Ezaki, Akira Takano, Makoto Maeda, Toru Hara

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Three-dimensionally assembled TES X-ray microcalorimeter arrays may be utilized for three purposes: (1) to obtain wide X-ray energy coverage of TES microcalorimeters, (2) to distinguish charged particle events from X-ray events, (3) to reconstruct Compton-scattering geometry for hard X-ray Compton cameras. We have designed and fabricated three-dimensionally assembled array of the minimum format i.e. 2 × 2 × 2 array in order to obtain a good energy resolution in a wide energy range of 0.5-20 keV and a high maximum counting rate of 2000 cps for energy dispersive X-ray spectrometer (EDS) system for a transmission electron microscope (TEM). Although we could not obtain required energy resolution because of a problem in the refrigerator system, we confirmed the operation of the three-dimensional array.

Original languageEnglish
Pages (from-to)186-191
Number of pages6
JournalIEICE Transactions on Electronics
Issue number3
Publication statusPublished - Mar 1 2015

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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