Abstract
The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.
| Original language | English |
|---|---|
| Pages (from-to) | 119-122 |
| Number of pages | 4 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 1397 |
| Issue number | pt 1 |
| Publication status | Published - 1991 |
| Event | 8th International Symposium on Gas Flow and Chemical Lasers Part 1 (of 2) - Madrid, Spain Duration: Sept 10 1990 → Sept 14 1990 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering