Thomson scattering diagnostic system for measurement of electron properties of processing plasmas

M. D. Bowden; Y. Goto; H. Yanaga; P. J.A. Howarth; K. Uchino; K. Muraoka

doi:10.1088/0963-0252/8/2/002

Thomson scattering diagnostic system for measurement of electron properties of processing plasmas

M. D. Bowden, Y. Goto, H. Yanaga, P. J.A. Howarth, K. Uchino, K. Muraoka

Electrical Engineering Sciences

Research output: Contribution to journal › Conference article › peer-review

27 Citations (Scopus)

Abstract

In recent years, the method of incoherent Thomson scattering has been used in the study of glow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy, high-repetition-rate YAG laser, a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5×10¹⁶ m^-3.

Original language	English
Pages (from-to)	203-209
Number of pages	7
Journal	Plasma Sources Science and Technology
Volume	8
Issue number	2
DOIs	https://doi.org/10.1088/0963-0252/8/2/002
Publication status	Published - May 1999
Event	Proceedings of the 1998 14th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases, ESCAMPIG-98 - Dublin, IRL Duration: Aug 26 1998 → Aug 29 1998

All Science Journal Classification (ASJC) codes

Condensed Matter Physics

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10.1088/0963-0252/8/2/002

Cite this

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title = "Thomson scattering diagnostic system for measurement of electron properties of processing plasmas",

abstract = "In recent years, the method of incoherent Thomson scattering has been used in the study of glow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy, high-repetition-rate YAG laser, a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5×1016 m-3.",

author = "Bowden, {M. D.} and Y. Goto and H. Yanaga and Howarth, {P. J.A.} and K. Uchino and K. Muraoka",

year = "1999",

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journal = "Plasma Sources Science and Technology",

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note = "Proceedings of the 1998 14th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases, ESCAMPIG-98 ; Conference date: 26-08-1998 Through 29-08-1998",

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T1 - Thomson scattering diagnostic system for measurement of electron properties of processing plasmas

AU - Bowden, M. D.

AU - Goto, Y.

AU - Yanaga, H.

AU - Howarth, P. J.A.

AU - Uchino, K.

AU - Muraoka, K.

PY - 1999/5

Y1 - 1999/5

N2 - In recent years, the method of incoherent Thomson scattering has been used in the study of glow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy, high-repetition-rate YAG laser, a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5×1016 m-3.

AB - In recent years, the method of incoherent Thomson scattering has been used in the study of glow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy, high-repetition-rate YAG laser, a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5×1016 m-3.

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DO - 10.1088/0963-0252/8/2/002

M3 - Conference article

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SN - 0963-0252

VL - 8

SP - 203

EP - 209

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

IS - 2

T2 - Proceedings of the 1998 14th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases, ESCAMPIG-98

Y2 - 26 August 1998 through 29 August 1998

ER -

Thomson scattering diagnostic system for measurement of electron properties of processing plasmas

Abstract

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