In recent years, the method of incoherent Thomson scattering has been used in the study of glow discharge plasmas to measure electron properties such as electron density and electron temperature. In this paper, we report the development of a Thomson scattering diagnostic system that is appropriate for measurements in glow discharges containing reactive chemical species. The new scattering system is based on a low-pulse-energy, high-repetition-rate YAG laser, a multipass cell for the laser beam, and an ICCD camera for simultaneous detection of the entire scattered spectrum. Measurements made in an electron cyclotron resonance plasma using the new system are presented. The lower detection limit of electron density is estimated to be 5×1016 m-3.
|Number of pages||7|
|Journal||Plasma Sources Science and Technology|
|Publication status||Published - May 1999|
|Event||Proceedings of the 1998 14th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases, ESCAMPIG-98 - Dublin, IRL|
Duration: Aug 26 1998 → Aug 29 1998
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics