Thermopile sensor-devices for the catalytic detection of hydrogen gas

Lionel Fabrice Houlet, Woosuck Shin, Kazuki Tajima, Maiko Nishibori, Noriya Izu, Toshio Itoh, Ichiro Matsubara

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)


We present the fabrication and the performance of a micro-thermoelectric hydrogen gas sensor built with a thermopile composed of 18 thermocouples on a dielectric thin membrane. Every thin film thermocouple is a pair of Au- and boron-doped Si0.8Ge0.2 thin films deposited by sputtering with the thickness of 200 and 300 nm, respectively. The gas detection of the sensor is triggered by the catalytic combustion of hydrogen and the thermopile converts the combustion heat to electric voltage and current. The performance of the device is studied with respect to the design of the heater, the thermopile, and the catalyst on the membrane. The sensor-device with the thermopile is also compared to a sensor with a single thermoelectric couple. The device built with the thermopile shows 11-fold amplification voltage signal and a thermopower 15 times than the single thermoelectric line device.

Original languageEnglish
Pages (from-to)200-206
Number of pages7
JournalSensors and Actuators, B: Chemical
Issue number1
Publication statusPublished - Mar 14 2008
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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