Thermoelectric micro-multi-gas sensor for the detection of hydrogen, carbon monoxide and methane

Maiko Nishibori; Woosuck Shin; Noriya Izu; Toshio Itoh; Ichiro Matsubara

doi:10.1166/sl.2011.1613

Thermoelectric micro-multi-gas sensor for the detection of hydrogen, carbon monoxide and methane

Maiko Nishibori, Woosuck Shin, Noriya Izu, Toshio Itoh, Ichiro Matsubara

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Micro-multi-gas sensor (micro-MGS) of 3 thermoelectric devices with 3 different combustion catalysts was developed. Using the micro-heater meanders of Pt/Pt-W thin film, the temperature of the Pt/Al₂O₃, Au/Co₃O₄ and Pt/Al₂O₃ catalysts were controlled to be 360, 240 and 140 °C for the selective combustion of CH₄, CO and H₂, respectively. The gas sensing performance of the micro-TGS for the gas mixture of 0.5-vol.%CH₄ + 0.5-vol%CO + 0.5-vol%H₂ was been investigated. The Pd/Al₂O₃ burned all gases and the Au/Co₃O₄ could burn CO selectively. The Pt/Al₂O₃ burned H₂ and CO by controlling the temperature of the catalyst. The selectivity of this micro-MGS with the Pd/Al₂O₃, Au/Co₃O₄ and Pt/Al₂O₃ catalysts is higher than that of a SnO ₂ based thick-film sensor array for H₂, CO, CH ₄. From the voltage signal from 3 different sensor elements, the micro-MGS could estimate the gas concentration selectively without any gas separation tool.

Original language	English
Pages (from-to)	773-777
Number of pages	5
Journal	Sensor Letters
Volume	9
Issue number	2
DOIs	https://doi.org/10.1166/sl.2011.1613
Publication status	Published - Apr 2011
Externally published	Yes

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1166/sl.2011.1613

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title = "Thermoelectric micro-multi-gas sensor for the detection of hydrogen, carbon monoxide and methane",

abstract = "Micro-multi-gas sensor (micro-MGS) of 3 thermoelectric devices with 3 different combustion catalysts was developed. Using the micro-heater meanders of Pt/Pt-W thin film, the temperature of the Pt/Al2O3, Au/Co3O4 and Pt/Al2O3 catalysts were controlled to be 360, 240 and 140 °C for the selective combustion of CH4, CO and H2, respectively. The gas sensing performance of the micro-TGS for the gas mixture of 0.5-vol.%CH4 + 0.5-vol%CO + 0.5-vol%H2 was been investigated. The Pd/Al2O3 burned all gases and the Au/Co3O4 could burn CO selectively. The Pt/Al2O3 burned H2 and CO by controlling the temperature of the catalyst. The selectivity of this micro-MGS with the Pd/Al2O3, Au/Co3O4 and Pt/Al2O3 catalysts is higher than that of a SnO 2 based thick-film sensor array for H2, CO, CH 4. From the voltage signal from 3 different sensor elements, the micro-MGS could estimate the gas concentration selectively without any gas separation tool.",

author = "Maiko Nishibori and Woosuck Shin and Noriya Izu and Toshio Itoh and Ichiro Matsubara",

year = "2011",

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doi = "10.1166/sl.2011.1613",

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T1 - Thermoelectric micro-multi-gas sensor for the detection of hydrogen, carbon monoxide and methane

AU - Nishibori, Maiko

AU - Shin, Woosuck

AU - Izu, Noriya

AU - Itoh, Toshio

AU - Matsubara, Ichiro

PY - 2011/4

Y1 - 2011/4

N2 - Micro-multi-gas sensor (micro-MGS) of 3 thermoelectric devices with 3 different combustion catalysts was developed. Using the micro-heater meanders of Pt/Pt-W thin film, the temperature of the Pt/Al2O3, Au/Co3O4 and Pt/Al2O3 catalysts were controlled to be 360, 240 and 140 °C for the selective combustion of CH4, CO and H2, respectively. The gas sensing performance of the micro-TGS for the gas mixture of 0.5-vol.%CH4 + 0.5-vol%CO + 0.5-vol%H2 was been investigated. The Pd/Al2O3 burned all gases and the Au/Co3O4 could burn CO selectively. The Pt/Al2O3 burned H2 and CO by controlling the temperature of the catalyst. The selectivity of this micro-MGS with the Pd/Al2O3, Au/Co3O4 and Pt/Al2O3 catalysts is higher than that of a SnO 2 based thick-film sensor array for H2, CO, CH 4. From the voltage signal from 3 different sensor elements, the micro-MGS could estimate the gas concentration selectively without any gas separation tool.

AB - Micro-multi-gas sensor (micro-MGS) of 3 thermoelectric devices with 3 different combustion catalysts was developed. Using the micro-heater meanders of Pt/Pt-W thin film, the temperature of the Pt/Al2O3, Au/Co3O4 and Pt/Al2O3 catalysts were controlled to be 360, 240 and 140 °C for the selective combustion of CH4, CO and H2, respectively. The gas sensing performance of the micro-TGS for the gas mixture of 0.5-vol.%CH4 + 0.5-vol%CO + 0.5-vol%H2 was been investigated. The Pd/Al2O3 burned all gases and the Au/Co3O4 could burn CO selectively. The Pt/Al2O3 burned H2 and CO by controlling the temperature of the catalyst. The selectivity of this micro-MGS with the Pd/Al2O3, Au/Co3O4 and Pt/Al2O3 catalysts is higher than that of a SnO 2 based thick-film sensor array for H2, CO, CH 4. From the voltage signal from 3 different sensor elements, the micro-MGS could estimate the gas concentration selectively without any gas separation tool.

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Thermoelectric micro-multi-gas sensor for the detection of hydrogen, carbon monoxide and methane

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