Thermal conductivity of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by coaxial arc plasma deposition

S. Takeichi, T. Nishiyama, M. Tabara, S. Kawawaki, M. Kohno, K. Takahashi, T. Yoshitake

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

The thermal conductivity of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by coaxial arc plasma deposition (CAPD) was measured by a timedomain thermoreflactance method. The specific heat and density of the films were measured to be 0.891 J/gK and 1.70 g/cm3, respectively, as parameters for the estimation of the thermal conductivity. Based on them, the thermal conductivity was estimated to be 2.32 W/m-K. This value is smaller than that of general UNCD/a-C:H films prepared by chemical vapor deposition (CVD). It might be because the CAPD films possesses a huge number of grain boundaries owing to extremely small grains of approximately 2.3 nm as compared with those of CVD films and its structure enhances phonon scattering.

Original languageEnglish
Title of host publicationCarbon Nanostructures
Subtitle of host publicationFrom Fundamental Studies to Applications and Devices
EditorsR. B. Weisman, S. V. Rotkin, H. Imahori, P. B. Atanassov
PublisherElectrochemical Society Inc.
Pages27-32
Number of pages6
Edition25
ISBN (Electronic)9781607687740
DOIs
Publication statusPublished - 2016
EventSymposium on Carbon Nanostructures: From Fundamental Studies to Applications and Devices - PRiME 2016/230th ECS Meeting - Honolulu, United States
Duration: Oct 2 2016Oct 7 2016

Publication series

NameECS Transactions
Number25
Volume75
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Other

OtherSymposium on Carbon Nanostructures: From Fundamental Studies to Applications and Devices - PRiME 2016/230th ECS Meeting
Country/TerritoryUnited States
CityHonolulu
Period10/2/1610/7/16

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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