TY - JOUR
T1 - Thermal conductivity measurement of indium-gallium-zinc-oxide thin films utilizing three-omega method
AU - Khan, Rauf
AU - Chang-Hoon, Shim
AU - Hattori, Reiji
N1 - Funding Information:
The authors are grateful to Prof. Michitaka Ohtaki, Kyushu University and Prof. Koji Miyazaki, Kyushu Institute of Technology for their kind supervision during the experiment. This work was supported by the Green Asia Program, Kyushu University.
Publisher Copyright:
© 2020 SID.
PY - 2020
Y1 - 2020
N2 - The temperature dependence of cross-plane thermal conductivity of Indium-Gallium-Zinc-Oxide (IGZO) thin film was measured using a differential three-omega method. The IGZO thin films were deposited on Al2O3 substrate by DC sputtering in room temperature. The thermal conductivities were observed to be 1.6, 1.8 and 2.6 W/(m·K) at some different oxygen partial pressures, 0%, 10%, and 65%, respectively. Furthermore, the thermal conductivity of IGZO thin film is decreasing with increasing the measurement ambient temperature according to the crystalline material typical characteristics. These results notify that a crystallinity exists inside the IGZO films and this crystalline phase governs the heat conduction into IGZO films.
AB - The temperature dependence of cross-plane thermal conductivity of Indium-Gallium-Zinc-Oxide (IGZO) thin film was measured using a differential three-omega method. The IGZO thin films were deposited on Al2O3 substrate by DC sputtering in room temperature. The thermal conductivities were observed to be 1.6, 1.8 and 2.6 W/(m·K) at some different oxygen partial pressures, 0%, 10%, and 65%, respectively. Furthermore, the thermal conductivity of IGZO thin film is decreasing with increasing the measurement ambient temperature according to the crystalline material typical characteristics. These results notify that a crystallinity exists inside the IGZO films and this crystalline phase governs the heat conduction into IGZO films.
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U2 - 10.1002/sdtp.14138
DO - 10.1002/sdtp.14138
M3 - Conference article
AN - SCOPUS:85094219116
SN - 0097-966X
VL - 51
SP - 1365
EP - 1368
JO - Digest of Technical Papers - SID International Symposium
JF - Digest of Technical Papers - SID International Symposium
IS - 1
T2 - 57th SID International Symposium, Seminar and Exhibition, Display Week, 2020
Y2 - 3 August 2020 through 7 August 2020
ER -