The discharge electrode for Ar2*excimer laser using plasma cathode

S. K. Hong, N. Hayashi, S. Ihara, S. Satoh, C. Yamabe, S. B. Wee

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

For the investigation of the possibility of the discharge-pumped Ar 2* excimer laser action, characteristics of the main-discharge in multi-atmospheric (1-5 atm) pure Ar gas have been investigated using the API (automatically pre-ionized) plasma electrode. It was demonstrated that the uniform pre-ionization formed the uniform main-discharge by the control effect of capacitance Cpr connected with the trigger electrode for preionization and the maximum energy deposition was increased. The control effect of capacitance Cpr was examined the time-dependent main-discharge from two-dimensional simulation of electric field distribution of the API plasma electrode discharge system.

Original languageEnglish
Pages (from-to)149-157
Number of pages9
JournalOptics Communications
Volume256
Issue number1-3
DOIs
Publication statusPublished - Dec 1 2005
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

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