The Critical Shear Stress for Slip Generation due to Scratches in Silicon Wafers

Jun Fujise, Bonggyun Ko, Toshiaki Ono, Masaki Tanaka

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	055012
Number of pages	7
Journal	ECS Journal of Solid State Science and Technology
Volume	9
Publication status	Published - Jun 17 2020

Cite this

@article{310eca1ff71e4d89b6874cae754cb04b,

title = "The Critical Shear Stress for Slip Generation due to Scratches in Silicon Wafers",

author = "Jun Fujise and Bonggyun Ko and Toshiaki Ono and Masaki Tanaka",

year = "2020",

month = jun,

day = "17",

language = "English",

volume = "9",

journal = "ECS Journal of Solid State Science and Technology",

issn = "2162-8769",

publisher = "Electrochemical Society, Inc.",

}