The Critical Shear Stress for Slip Generation due to Scratches in Silicon Wafers

Jun Fujise, Bonggyun Ko, Toshiaki Ono, Masaki Tanaka

    Research output: Contribution to journalArticlepeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Article number055012
    Number of pages7
    JournalECS Journal of Solid State Science and Technology
    Publication statusPublished - Jun 17 2020

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