The 10th Asia-Pacific conference on Plasma Science and Technology (APCPST 2010): The 153rd symposium on Plasma Science for Materials (SPSM 2010)

H. Y. Chae, Chin Wook Chung, J. W. Chung, M. P. Hong, J. H. Joo, H. J. Kim, D. H. Kim, E. Kusano, L. Overzet, Yi Kang Pu, Y. Setsuhara, J. J. Shi, K. Terashima, T. Watanabe

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