Temperature-dependent specific heat of suspended platinum nanofilms at 80-380 K

Metallic nanofilms are important components of nanoscale electronic circuits and nanoscale sensors. The accurate characterization of the thermophysical properties of nanofilms is very important for nanoscience and nanotechnology. Currently, there is very little specific heat data for metallic nanofilms, and the existing measurements indicate distinct differences according to the nanofilm size. The present work reports the specific heats of 40-nm-thick suspended platinum nanofilms at 80-380 K and ∼5×10^-4 Pa using the 3ω method. Over 80-380 K, the specific heats of the Pt nanofilms range from 166-304 J/(kg•K), which are 1.65-2.60 times the bulk values, indicating significant size effects. These results are useful for both scientific research in nanoscale thermophysics and evaluating the transient thermal response of nanoscale devices.