Technology for MEMS commercialization: Current status and future prospects

Renshi Sawada, Eiji Higurashi

    Research output: Contribution to journalReview articlepeer-review

    Original languageEnglish
    Pages (from-to)491-497
    Number of pages7
    JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
    Issue number5
    Publication statusPublished - May 2010

    All Science Journal Classification (ASJC) codes

    • Mechanical Engineering

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