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T1601-2-6 樹脂上金属薄膜への熱ナノインプリント加工(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(2))
Translated title of the contribution
:
T1601-2-6 Thermal nanoimprint lithography for thin metal films on PET substrates
酒井 佑典
,
津守 不二夫
, 小寺 秀俊
Manufacturing Process
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Medicine and Dentistry
Metal
100%
Specimen
40%
Polymer
40%
Chlormethine
20%
Engineering
Nanoimprint Lithography
80%
Substrates
60%
Thin Films
20%
Polymer Substrate
20%
Composite Specimen
20%
Material Science
Metal Film
80%
Thin Films
20%
Polymer Composite
20%
Metal
20%
Optical Device
20%