Synthesis of platinum silicide at platinum/silicon oxide interface by photon irradiation

K. Sato; H. Yasuda; S. Ichikawa; M. Imamura; K. Takahashi; S. Hata; S. Matsumura; S. Anada; J. G. Lee; H. Mori

doi:10.1016/j.actamat.2018.05.045

Synthesis of platinum silicide at platinum/silicon oxide interface by photon irradiation

K. Sato, H. Yasuda, S. Ichikawa, M. Imamura, K. Takahashi, S. Hata, S. Matsumura, S. Anada, J. G. Lee, H. Mori

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The synthesis of platinum silicide at a Pt/SiO_x interface by photon irradiation was investigated using transmission electron microscopy. A platinum silicide, Pt₂Si, was successfully formed at the Pt/SiO_x interface by irradiation with 680 and 140 eV photons, but not by irradiation with 80 eV photons. Silicide formation was also induced by irradiation with electrons of energy 75 keV. The amount of silicide formed by photon irradiation was lower than the amount obtained by electron irradiation. Silicide formation by both photon and electron irradiation was accompanied by Si depletion in amorphous SiO_x. The experimental results indicate that silicide formation is induced by electronic excitation. A possible mechanism for silicide formation is proposed on the basis of the results.

Original language	English
Pages (from-to)	284-294
Number of pages	11
Journal	Acta Materialia
Volume	154
DOIs	https://doi.org/10.1016/j.actamat.2018.05.045
Publication status	Published - Aug 1 2018

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Polymers and Plastics
Metals and Alloys

Access to Document

10.1016/j.actamat.2018.05.045

Cite this

@article{9d0fcd3827824a05924370044e5b6f64,

title = "Synthesis of platinum silicide at platinum/silicon oxide interface by photon irradiation",

abstract = "The synthesis of platinum silicide at a Pt/SiOx interface by photon irradiation was investigated using transmission electron microscopy. A platinum silicide, Pt2Si, was successfully formed at the Pt/SiOx interface by irradiation with 680 and 140 eV photons, but not by irradiation with 80 eV photons. Silicide formation was also induced by irradiation with electrons of energy 75 keV. The amount of silicide formed by photon irradiation was lower than the amount obtained by electron irradiation. Silicide formation by both photon and electron irradiation was accompanied by Si depletion in amorphous SiOx. The experimental results indicate that silicide formation is induced by electronic excitation. A possible mechanism for silicide formation is proposed on the basis of the results.",

author = "K. Sato and H. Yasuda and S. Ichikawa and M. Imamura and K. Takahashi and S. Hata and S. Matsumura and S. Anada and Lee, {J. G.} and H. Mori",

note = "Funding Information: Part of this work was supported by the program Advanced Research Network for Ultra-Microscopic Science ( FY2016– ), from the Ministry of Education, Culture, Sports, Science, and Technology (MEXT), Japan . We thank Helen McPherson, PhD, for editing a draft of this manuscript. Publisher Copyright: {\textcopyright} 2018 Acta Materialia Inc.",

year = "2018",

month = aug,

day = "1",

doi = "10.1016/j.actamat.2018.05.045",

language = "English",

volume = "154",

pages = "284--294",

journal = "Acta Materialia",

issn = "1359-6454",

publisher = "Elsevier Limited",

}

TY - JOUR

T1 - Synthesis of platinum silicide at platinum/silicon oxide interface by photon irradiation

AU - Sato, K.

AU - Yasuda, H.

AU - Ichikawa, S.

AU - Imamura, M.

AU - Takahashi, K.

AU - Hata, S.

AU - Matsumura, S.

AU - Anada, S.

AU - Lee, J. G.

AU - Mori, H.

N1 - Funding Information: Part of this work was supported by the program Advanced Research Network for Ultra-Microscopic Science ( FY2016– ), from the Ministry of Education, Culture, Sports, Science, and Technology (MEXT), Japan . We thank Helen McPherson, PhD, for editing a draft of this manuscript. Publisher Copyright: © 2018 Acta Materialia Inc.

PY - 2018/8/1

Y1 - 2018/8/1

N2 - The synthesis of platinum silicide at a Pt/SiOx interface by photon irradiation was investigated using transmission electron microscopy. A platinum silicide, Pt2Si, was successfully formed at the Pt/SiOx interface by irradiation with 680 and 140 eV photons, but not by irradiation with 80 eV photons. Silicide formation was also induced by irradiation with electrons of energy 75 keV. The amount of silicide formed by photon irradiation was lower than the amount obtained by electron irradiation. Silicide formation by both photon and electron irradiation was accompanied by Si depletion in amorphous SiOx. The experimental results indicate that silicide formation is induced by electronic excitation. A possible mechanism for silicide formation is proposed on the basis of the results.

AB - The synthesis of platinum silicide at a Pt/SiOx interface by photon irradiation was investigated using transmission electron microscopy. A platinum silicide, Pt2Si, was successfully formed at the Pt/SiOx interface by irradiation with 680 and 140 eV photons, but not by irradiation with 80 eV photons. Silicide formation was also induced by irradiation with electrons of energy 75 keV. The amount of silicide formed by photon irradiation was lower than the amount obtained by electron irradiation. Silicide formation by both photon and electron irradiation was accompanied by Si depletion in amorphous SiOx. The experimental results indicate that silicide formation is induced by electronic excitation. A possible mechanism for silicide formation is proposed on the basis of the results.

UR - http://www.scopus.com/inward/record.url?scp=85047439477&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85047439477&partnerID=8YFLogxK

U2 - 10.1016/j.actamat.2018.05.045

DO - 10.1016/j.actamat.2018.05.045

M3 - Article

AN - SCOPUS:85047439477

SN - 1359-6454

VL - 154

SP - 284

EP - 294

JO - Acta Materialia

JF - Acta Materialia

ER -

Synthesis of platinum silicide at platinum/silicon oxide interface by photon irradiation

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this