TY - JOUR
T1 - Synthesis of non-agglomerated nanoparticles by an electrospray assisted chemical vapor deposition (ES-CVD) method
AU - Nakaso, K.
AU - Han, B.
AU - Ahn, K. H.
AU - Choi, M.
AU - Okuyama, K.
N1 - Funding Information:
The authors thank Mr. M. Kojio (Hiroshima University) for his help in the experiments, as well as Mr. T. Uranaka (Ryomei Engineering Co., LTD.) for measuring the EDS spectra of product nanoparticles. This work was supported in part by Research Fellowships of the Japan Society for the Promotion of Science for Young Scientists (Grant No. 01238), by the New Energy and Industrial Technology Development Organization (NEDO)'s “Nanotechnology Materials Program-Nanotechnology Particle Project” based on fund provided by the Ministry of Economy, Trade, and Industry (METI), Japan, and by Hosokawa Powder Technology Foundation. This work was also supported in part by the Creative Research Initiatives from the Korean Ministry of Science and Technology (Center for Nano Particle Control). B. Han thanks the Brain Korea 21 project for financial support.
PY - 2003/7/1
Y1 - 2003/7/1
N2 - Non-agglomerated spherical silicon, titanium and zirconium oxide nanoparticles were prepared using an electrospray assisted chemical vapor deposition (ES-CVD) process. Metal alkoxides in conjunction with an electrospray method were used to introduce charged precursors into a CVD reactor. The ions are produced during evaporation of the charged droplets, and they probably act as seed nuclei (i.e., ion-induced nucleation) and/or, they are attached to the produced particles. The experimental results were compared with those obtained using a conventional evaporation CVD method. The particles generated using the conventional evaporation method were agglomerated to a considerable extent irregardless of the type of particle. Whereas, at the same conditions, high concentrations of non-agglomerated nanoparticles having diameters in the range of 10-40 nm were obtained using the ES-CVD method. This appears to be due to the charging effects of the generated particles, that is, the electrostatic dispersion of unipolarly charged particles. The size of the non-agglomerated particles in the ES-CVD method was reduced as the results of the decease in the concentration of precursors introduced by electrospray.
AB - Non-agglomerated spherical silicon, titanium and zirconium oxide nanoparticles were prepared using an electrospray assisted chemical vapor deposition (ES-CVD) process. Metal alkoxides in conjunction with an electrospray method were used to introduce charged precursors into a CVD reactor. The ions are produced during evaporation of the charged droplets, and they probably act as seed nuclei (i.e., ion-induced nucleation) and/or, they are attached to the produced particles. The experimental results were compared with those obtained using a conventional evaporation CVD method. The particles generated using the conventional evaporation method were agglomerated to a considerable extent irregardless of the type of particle. Whereas, at the same conditions, high concentrations of non-agglomerated nanoparticles having diameters in the range of 10-40 nm were obtained using the ES-CVD method. This appears to be due to the charging effects of the generated particles, that is, the electrostatic dispersion of unipolarly charged particles. The size of the non-agglomerated particles in the ES-CVD method was reduced as the results of the decease in the concentration of precursors introduced by electrospray.
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U2 - 10.1016/S0021-8502(03)00053-3
DO - 10.1016/S0021-8502(03)00053-3
M3 - Article
AN - SCOPUS:0038162427
SN - 0021-8502
VL - 34
SP - 869
EP - 881
JO - Journal of Aerosol Science
JF - Journal of Aerosol Science
IS - 7
ER -