TY - JOUR
T1 - Synthesis and characterization of metal-filled carbon nanotubes by microwave plasma chemical vapor deposition
AU - Hayashi, Y.
AU - Tokunaga, T.
AU - Toh, S.
AU - Moon, W. J.
AU - Kaneko, K.
N1 - Funding Information:
This work was supported by the “Nanotechnology Support Project” of the Ministry of Education, Culture, Sports, Science, and Technology (MEXT), Japan, carried out at the Research Laboratory of High Voltage Electron Microscopy at Kyushu University. This work was also partly supported by the Grant-in Aid for Scientific Research (Houga-16651065) of the MEXT, and the Research Foundation for the Electrotechnology of Chubu (REFEC) as travel expense grant.
PY - 2005/3
Y1 - 2005/3
N2 - A new type of palladium-based metal-filled carbon nanotubes (MF-CNTs) was fabricated and their characteristics were investigated. The MF-CNTs were grown on Pd/SiO2/Si substrates and Pd/Mo mesh by a microwave plasma-enhanced chemical vapor deposition method using CH4 and H 2 gasses with the technique of bias-enhanced growth method. The structure and composition of Pd-based MF-CNTs were thoroughly investigated by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive X-ray spectroscopy (EDS), and Raman spectroscopy. TEM and EDS analyses showed that MF-CNTs were composed of thick cylindrical graphite walls, and filled with Pd metal inside their roots. Based on TEM characterizations, we proposed a fruitful description for the encapsulating mechanisms.
AB - A new type of palladium-based metal-filled carbon nanotubes (MF-CNTs) was fabricated and their characteristics were investigated. The MF-CNTs were grown on Pd/SiO2/Si substrates and Pd/Mo mesh by a microwave plasma-enhanced chemical vapor deposition method using CH4 and H 2 gasses with the technique of bias-enhanced growth method. The structure and composition of Pd-based MF-CNTs were thoroughly investigated by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive X-ray spectroscopy (EDS), and Raman spectroscopy. TEM and EDS analyses showed that MF-CNTs were composed of thick cylindrical graphite walls, and filled with Pd metal inside their roots. Based on TEM characterizations, we proposed a fruitful description for the encapsulating mechanisms.
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U2 - 10.1016/j.diamond.2004.12.008
DO - 10.1016/j.diamond.2004.12.008
M3 - Article
AN - SCOPUS:18444365024
SN - 0925-9635
VL - 14
SP - 790
EP - 793
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 3-7
ER -