Submicroscale flow sensor employing suspended hot film with carbon nanotube fins

Yohei Ito, Taku Higuchi, Koji Takahashi

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


A submicroscale flow sensor has been developed that consists of a suspended hot film and carbon nanotube (CNT) fins. Flow measurement experiments, together with a theoretical model, revealed the advantages of the use of CNT fins. The suspended metal film reduces heat loss and the CNT fins enhance the heat transfer to the fluid flow. Herein, the working principle of the CNT fins is presented in detail, together with a description of the micro electro mechanical systems (MEMS)/nano electro mechanical systems (NEMS) techniques used to fabricate the sensor. The CNTs were deposited by a manipulation method that is based on dielectrophoresis.

Original languageEnglish
Pages (from-to)51-60
Number of pages10
JournalJournal of Thermal Science and Technology
Issue number1
Publication statusPublished - 2010

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • General Materials Science
  • Instrumentation
  • Engineering (miscellaneous)


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