@article{53b4b6a98d03479289435031ef0fa3fa,
title = "Study of Depth Distribution Shift of Copper on Silicon Wafer Surface Using Total Reflection X-Ray Fluorescence Spectrometry",
author = "Yoshihiro Mori and Kengo Shimanoe",
note = "Funding Information: This research is partially supported by U.S. Army Research Laboratorys Translational Neurosciences Branch (Aberdeen), and the National Science Foundation.",
year = "1996",
month = apr,
doi = "10.2116/analsci.12.277",
language = "English",
volume = "12",
pages = "277--279",
journal = "analytical sciences",
issn = "0910-6340",
publisher = "The Japan Society for Analytical Chemistry",
number = "2",
}