Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance

Noriaki Ishikawa; Koji Okazaki; Ayumu Kudo; Renshi Sawada

doi:10.1109/OMN.2016.7565866

Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance

Noriaki Ishikawa, Koji Okazaki, Ayumu Kudo, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper reports a stable electrostatic comb-driven scanner detecting electrostatic capacitance between the comb-shaped electrodes of mirror and the detecting electrodes, and feeding it back to the drive signals applied to the driving electrodes.

Original language	English
Title of host publication	2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781509010356
DOIs	https://doi.org/10.1109/OMN.2016.7565866
Publication status	Published - Sept 13 2016
Event	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore Duration: Jul 31 2016 → Aug 4 2016

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	2016-September
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Country/Territory	Singapore
City	Singapore
Period	7/31/16 → 8/4/16

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2016.7565866

Cite this

Ishikawa, N., Okazaki, K., Kudo, A., & Sawada, R. (2016). Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings Article 7565866 (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September). IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565866

Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance. / Ishikawa, Noriaki; Okazaki, Koji; Kudo, Ayumu et al.
2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. IEEE Computer Society, 2016. 7565866 (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ishikawa, N, Okazaki, K, Kudo, A & Sawada, R 2016, Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings., 7565866, International Conference on Optical MEMS and Nanophotonics, vol. 2016-September, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 7/31/16. https://doi.org/10.1109/OMN.2016.7565866

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abstract = "This paper reports a stable electrostatic comb-driven scanner detecting electrostatic capacitance between the comb-shaped electrodes of mirror and the detecting electrodes, and feeding it back to the drive signals applied to the driving electrodes.",

author = "Noriaki Ishikawa and Koji Okazaki and Ayumu Kudo and Renshi Sawada",

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Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance

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