Spectral dynamics of narrow-band F2 laser for optical lithography

H. Tanaka; A. Takahashi; T. Okada; T. Ariga; R. Nohdomi; K. Hotta; H. Mizoguchi

doi:10.1007/s00340-003-1155-1

Spectral dynamics of narrow-band F₂ laser for optical lithography

H. Tanaka, A. Takahashi, T. Okada, T. Ariga, R. Nohdomi, K. Hotta, H. Mizoguchi

Division of medical Quantum Science

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We describe the spectral dynamics of a line-narrowed F₂ laser, based on numerical simulation by a newly developed simulation code. The results were compared with the experimental results and it was found that the code could predict well the performance of a line-narrowed operation of the F₂ laser. The code was also used to obtain a guideline for the optimized operation of an injection-seeded F₂ laser system. In addition, a new spectral narrowing technique for the F₂ laser has been proposed and its effectiveness was evaluated by the simulation code.

Original language	English
Pages (from-to)	735-740
Number of pages	6
Journal	Applied Physics B: Lasers and Optics
Volume	76
Issue number	7
DOIs	https://doi.org/10.1007/s00340-003-1155-1
Publication status	Published - Jul 2003

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1007/s00340-003-1155-1

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abstract = "We describe the spectral dynamics of a line-narrowed F2 laser, based on numerical simulation by a newly developed simulation code. The results were compared with the experimental results and it was found that the code could predict well the performance of a line-narrowed operation of the F2 laser. The code was also used to obtain a guideline for the optimized operation of an injection-seeded F2 laser system. In addition, a new spectral narrowing technique for the F2 laser has been proposed and its effectiveness was evaluated by the simulation code.",

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AU - Tanaka, H.

AU - Takahashi, A.

AU - Okada, T.

AU - Ariga, T.

AU - Nohdomi, R.

AU - Hotta, K.

AU - Mizoguchi, H.

PY - 2003/7

Y1 - 2003/7

N2 - We describe the spectral dynamics of a line-narrowed F2 laser, based on numerical simulation by a newly developed simulation code. The results were compared with the experimental results and it was found that the code could predict well the performance of a line-narrowed operation of the F2 laser. The code was also used to obtain a guideline for the optimized operation of an injection-seeded F2 laser system. In addition, a new spectral narrowing technique for the F2 laser has been proposed and its effectiveness was evaluated by the simulation code.

AB - We describe the spectral dynamics of a line-narrowed F2 laser, based on numerical simulation by a newly developed simulation code. The results were compared with the experimental results and it was found that the code could predict well the performance of a line-narrowed operation of the F2 laser. The code was also used to obtain a guideline for the optimized operation of an injection-seeded F2 laser system. In addition, a new spectral narrowing technique for the F2 laser has been proposed and its effectiveness was evaluated by the simulation code.

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Spectral dynamics of narrow-band F₂ laser for optical lithography

Abstract

All Science Journal Classification (ASJC) codes

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