Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography
- Yuta Sato
- , Kentaro Tomita
- , Syoichi Tsukiyama
- , Toshiaki Eguchi
- , Kiichiro Uchino
- , Kouichiro Kouge
- , Hiroaki Tomuro
- , Tatsuya Yanagida
- , Yasunori Wada
- , Masahito Kunishima
- , Takeshi Kodama
- , Hakaru Mizoguchi
Research output: Contribution to journal › Article › peer-review
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(Scopus)