Solid-state electrochemical micromachining

Kai Kamada; Kazuyoshi Izawa; Yuko Tsutsumi; Shuichi Yamashita; Naoya Enomoto; Junichi Hojo; Yasumichi Matsumoto

doi:10.1021/cm0502929

Solid-state electrochemical micromachining

Kai Kamada, Kazuyoshi Izawa, Yuko Tsutsumi, Shuichi Yamashita, Naoya Enomoto, Junichi Hojo, Yasumichi Matsumoto

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

An approach for solid-state micromachining using an anodic electrochemical reaction at the microcontact between the ion conducting microelectrode and metal substrate was proposed. The method called solid-state electrochemical micromachining (SSEM), can control the machining size and depth by adjusting the contact area or other EM parameters. Scanning the microelectrode under an applied electric field results in a fine-patterned surface. The metal surface can be directly patterned in almost any configuration desired, since it is a solid-state process that do not require any solutions.

Original language	English
Pages (from-to)	1930-1932
Number of pages	3
Journal	Chemistry of Materials
Volume	17
Issue number	8
DOIs	https://doi.org/10.1021/cm0502929
Publication status	Published - Apr 19 2005

All Science Journal Classification (ASJC) codes

Chemistry(all)
Chemical Engineering(all)
Materials Chemistry

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10.1021/cm0502929

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T1 - Solid-state electrochemical micromachining

AU - Kamada, Kai

AU - Izawa, Kazuyoshi

AU - Tsutsumi, Yuko

AU - Yamashita, Shuichi

AU - Enomoto, Naoya

AU - Hojo, Junichi

AU - Matsumoto, Yasumichi

PY - 2005/4/19

Y1 - 2005/4/19

N2 - An approach for solid-state micromachining using an anodic electrochemical reaction at the microcontact between the ion conducting microelectrode and metal substrate was proposed. The method called solid-state electrochemical micromachining (SSEM), can control the machining size and depth by adjusting the contact area or other EM parameters. Scanning the microelectrode under an applied electric field results in a fine-patterned surface. The metal surface can be directly patterned in almost any configuration desired, since it is a solid-state process that do not require any solutions.

AB - An approach for solid-state micromachining using an anodic electrochemical reaction at the microcontact between the ion conducting microelectrode and metal substrate was proposed. The method called solid-state electrochemical micromachining (SSEM), can control the machining size and depth by adjusting the contact area or other EM parameters. Scanning the microelectrode under an applied electric field results in a fine-patterned surface. The metal surface can be directly patterned in almost any configuration desired, since it is a solid-state process that do not require any solutions.

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JO - Chemistry of Materials

JF - Chemistry of Materials

IS - 8

ER -

Solid-state electrochemical micromachining

Abstract

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