Sol-gel fabrication of dielectric HfO2 nano-films; formation of uniform, void-free layers and their superior electrical properties

Yoshitaka Aoki, Toyoki Kunitake, Aiko Nakao

Research output: Contribution to journalArticlepeer-review

85 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Sol-gel fabrication of dielectric HfO2 nano-films; formation of uniform, void-free layers and their superior electrical properties'. Together they form a unique fingerprint.

Material Science