Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma; Teruaki Motooka; Shinji Munetoh; Hirofumi Sakita; Hafizal Yahaya; H Naramoto; K Narumi; S Sakai; Y Maeda

Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

Yoshifumi Ikoma, Teruaki Motooka, Shinji Munetoh, Hirofumi Sakita, Hafizal Yahaya, H Naramoto, K Narumi, S Sakai, Y Maeda

Research output: Working paper

Original language	English
Publisher	Japan Atomic Energy Agency
Pages	126
Number of pages	1
Volume	229-041
Publication status	Published - Dec 2009

Cite this

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title = "Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)",

author = "Yoshifumi Ikoma and Teruaki Motooka and Shinji Munetoh and Hirofumi Sakita and Hafizal Yahaya and H Naramoto and K Narumi and S Sakai and Y Maeda",

year = "2009",

month = dec,

language = "English",

volume = "229-041",

pages = "126",

publisher = "Japan Atomic Energy Agency",

type = "WorkingPaper",

institution = "Japan Atomic Energy Agency",

}

TY - UNPB

T1 - Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

AU - Ikoma, Yoshifumi

AU - Motooka, Teruaki

AU - Munetoh, Shinji

AU - Sakita, Hirofumi

AU - Yahaya, Hafizal

AU - Naramoto, H

AU - Narumi, K

AU - Sakai, S

AU - Maeda, Y

PY - 2009/12

Y1 - 2009/12

M3 - Working paper

VL - 229-041

SP - 126

BT - Smart-Cut Processes for Nanopore Device Formation on SIMOX(100)

PB - Japan Atomic Energy Agency

ER -