TY - JOUR
T1 - Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition
AU - Hwang, Sung Hwa
AU - Okumura, Takamasa
AU - Kamataki, Kunihiro
AU - Itagaki, Naho
AU - Koga, Kazunori
AU - Shiratani, Masaharu
N1 - Funding Information:
This study was partly supported by JSPS KAKENHI Grant Number JP26246036 , JP20H00142 and JP20J13122 . The electron microscopy observation in this study was performed at the following locations: The Ultramicroscopy Research Laboratory, Kyushu University, Japan.
Funding Information:
This study was partly supported by JSPS KAKENHI Grant Number JP26246036, JP20H00142 and JP20J13122. The electron microscopy observation in this study was performed at the following locations: The Ultramicroscopy Research Laboratory, Kyushu University, Japan.
Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2020/11
Y1 - 2020/11
N2 - Carbon nanoparticles (CNPs) were synthesized using Ar + CH4 multi-hollow plasma chemical vapor deposition. The deposition flux of CNPs to a substrate was studied as a function of the plasma discharge time t and the distance L between the plasma and the substrate. CNPs were not deposited for L = 60 and 80 mm, whereas they were deposited for L = 100, 120 and 140 mm. The mean diameter of CNPs was 25 nm irrespective of L. For L = 120 and 140 mm, the flux gradually increased until t = 30 min and then became constant, indicating that thermophoretic force drives CNPs' deposition. Raman spectroscopy showed that a-C:H films were formed for L ≤ 80 mm, while polymer CNPs were predominant deposits for L ≥ 100 mm.
AB - Carbon nanoparticles (CNPs) were synthesized using Ar + CH4 multi-hollow plasma chemical vapor deposition. The deposition flux of CNPs to a substrate was studied as a function of the plasma discharge time t and the distance L between the plasma and the substrate. CNPs were not deposited for L = 60 and 80 mm, whereas they were deposited for L = 100, 120 and 140 mm. The mean diameter of CNPs was 25 nm irrespective of L. For L = 120 and 140 mm, the flux gradually increased until t = 30 min and then became constant, indicating that thermophoretic force drives CNPs' deposition. Raman spectroscopy showed that a-C:H films were formed for L ≤ 80 mm, while polymer CNPs were predominant deposits for L ≥ 100 mm.
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U2 - 10.1016/j.diamond.2020.108050
DO - 10.1016/j.diamond.2020.108050
M3 - Article
AN - SCOPUS:85090205629
SN - 0925-9635
VL - 109
JO - Diamond and Related Materials
JF - Diamond and Related Materials
M1 - 108050
ER -