Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle

H. Murakami; A. Katsuki; T. Sajima; N. Nakayama

Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle

H. Murakami, A. Katsuki, T. Sajima, N. Nakayama

Manufacturing Process

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present a simple and low-cost optical measurement system to measure simultaneously five-degrees-of-freedom error motions of high-speed microspindles. In this study, measurement error due to displacement of an irradiation laser spot on a 3 mm diameter ball lens is analyzed. The results show that the maximum error in the Z direction due to the 7μm displacement of the laser spot in the X direction is about 0.15 nm, i.e., the change of the laser beam irradiation point of the ball lens caused by the radial displacement has little effect on the measurement accuracy.

Original language	English
Title of host publication	Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Editors	H. Spaan, Theresa Burke, Paul Shore
Publisher	euspen
Pages	46-49
Number of pages	4
ISBN (Electronic)	9780956679000
Publication status	Published - 2012
Event	12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, Sweden Duration: Jun 4 2012 → Jun 7 2012

Publication series

Name	Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Volume	2

Other

Other	12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Country/Territory	Sweden
City	Stockholm
Period	6/4/12 → 6/7/12

All Science Journal Classification (ASJC) codes

Industrial and Manufacturing Engineering
Mechanical Engineering
Instrumentation
Environmental Engineering
Materials Science(all)

Cite this

Murakami, H., Katsuki, A., Sajima, T., & Nakayama, N. (2012). Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle. In H. Spaan, T. Burke, & P. Shore (Eds.), Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 (pp. 46-49). (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 2). euspen.

Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle. / Murakami, H.; Katsuki, A.; Sajima, T. et al.
Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. ed. / H. Spaan; Theresa Burke; Paul Shore. euspen, 2012. p. 46-49 (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Murakami, H, Katsuki, A, Sajima, T & Nakayama, N 2012, Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle. in H Spaan, T Burke & P Shore (eds), Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, vol. 2, euspen, pp. 46-49, 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, Stockholm, Sweden, 6/4/12.

Murakami H, Katsuki A, Sajima T, Nakayama N. Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle. In Spaan H, Burke T, Shore P, editors, Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. euspen. 2012. p. 46-49. (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012).

Murakami, H. ; Katsuki, A. ; Sajima, T. et al. / Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle. Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. editor / H. Spaan ; Theresa Burke ; Paul Shore. euspen, 2012. pp. 46-49 (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012).

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AB - We present a simple and low-cost optical measurement system to measure simultaneously five-degrees-of-freedom error motions of high-speed microspindles. In this study, measurement error due to displacement of an irradiation laser spot on a 3 mm diameter ball lens is analyzed. The results show that the maximum error in the Z direction due to the 7μm displacement of the laser spot in the X direction is about 0.15 nm, i.e., the change of the laser beam irradiation point of the ball lens caused by the radial displacement has little effect on the measurement accuracy.

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Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle

Abstract

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All Science Journal Classification (ASJC) codes

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