Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate

W. Nomura; T. Yatsui; Y. Yanase; K. Suzuki; M. Fujita; A. Kamata; M. Naruse; M. Ohtsu

Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al₂O₃ ceramic substrate

W. Nomura, T. Yatsui, Y. Yanase, K. Suzuki, M. Fujita, A. Kamata, M. Naruse, M. Ohtsu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The scratches on the surface of Al₂O₃ ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.

Original language	English
Title of host publication	Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
Subtitle of host publication	2010 Laser Science to Photonic Applications, CLEO/QELS 2010
Publication status	Published - Oct 11 2010
Event	Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010 - San Jose, CA, United States Duration: May 16 2010 → May 21 2010

Publication series

Name	Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010

Other

Other	Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
Country/Territory	United States
City	San Jose, CA
Period	5/16/10 → 5/21/10

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Radiation

Cite this

Nomura, W., Yatsui, T., Yanase, Y., Suzuki, K., Fujita, M., Kamata, A., Naruse, M., & Ohtsu, M. (2010). Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al₂O₃ ceramic substrate. In Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010 [5500706] (Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010).

Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al₂O₃ ceramic substrate. / Nomura, W.; Yatsui, T.; Yanase, Y. et al.
Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010. 5500706 (Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nomura, W, Yatsui, T, Yanase, Y, Suzuki, K, Fujita, M, Kamata, A, Naruse, M & Ohtsu, M 2010, Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al₂O₃ ceramic substrate. in Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010., 5500706, Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010, Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010, San Jose, CA, United States, 5/16/10.

Nomura W, Yatsui T, Yanase Y, Suzuki K, Fujita M, Kamata A et al. Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al₂O₃ ceramic substrate. In Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010. 5500706. (Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010).

Nomura, W. ; Yatsui, T. ; Yanase, Y. et al. / Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al₂O₃ ceramic substrate. Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010. (Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010).

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abstract = "The scratches on the surface of Al2O3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.",

author = "W. Nomura and T. Yatsui and Y. Yanase and K. Suzuki and M. Fujita and A. Kamata and M. Naruse and M. Ohtsu",

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AU - Suzuki, K.

AU - Fujita, M.

AU - Kamata, A.

AU - Naruse, M.

AU - Ohtsu, M.

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