Self-calibrated measurement of ion flow using a fine multihole directional langmuir probe

Kenichiro Terasaka, Shinji Yoshimura, Tetsushi Katahira, Kohei Ogiwara, Mitsutoshi Aramaki, Masayoshi Y. Tanaka

    Research output: Contribution to journalArticlepeer-review

    5 Citations (Scopus)


    A fine multihole directional Langmuir probe (FM-DLP) has been developed to measure ion Mach number and tested in an electron cyclotron resonance (ECR) plasma. It is found that the FM-DLP can measure the ion Mach number with the same method used for a conventional directional Langmuir probe (DLP). Moreover, the sensitivity of the FM-DLP is almost twice as high as that of the conventional DLP by changing the aspect ratio of the hole that collects ion saturation current. It is also found that the electron saturation current of the FM-DLP is markedly reduced to the level of ion saturation current; thus, the current-voltage characteristics of the FM-DLP become similar to those of an emissive probe, which suggests the emissive-probe-like function of the FM-DLP. We have demonstrated that the FM-DLP can measure the plasma potential, which enables us to determine the calibration factor without other diagnostic tools. Therefore, it is concluded that the FM-DLP has a self-calibration capability for ion flow measurement.

    Original languageEnglish
    JournalJapanese journal of applied physics
    Issue number3 PART 1
    Publication statusPublished - 2010

    All Science Journal Classification (ASJC) codes

    • General Engineering
    • General Physics and Astronomy


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