TY - GEN
T1 - Scanning angle control of the optical micro scanner actuated by electrostatic force
AU - Ishikawa, Noriaki
AU - Ikeda, Kentaro
AU - Okazaki, Koji
AU - Sawada, Renshi
PY - 2014/10/14
Y1 - 2014/10/14
N2 - The optical micro scanner is used for various applications, but its scanning performance is affected by temperature. In this paper, we report the temperature dependence of the optical scan angle and the way to control it. It was found that the optical scan angle became small when the temperature rose. However, it was possible to make the optical scan angle constant by regulating the DC voltage that was applied between two comb-electrodes of the optical micro scanner.
AB - The optical micro scanner is used for various applications, but its scanning performance is affected by temperature. In this paper, we report the temperature dependence of the optical scan angle and the way to control it. It was found that the optical scan angle became small when the temperature rose. However, it was possible to make the optical scan angle constant by regulating the DC voltage that was applied between two comb-electrodes of the optical micro scanner.
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U2 - 10.1109/OMN.2014.6924550
DO - 10.1109/OMN.2014.6924550
M3 - Conference contribution
AN - SCOPUS:84908022733
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 121
EP - 122
BT - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PB - IEEE Computer Society
T2 - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Y2 - 17 August 2014 through 21 August 2014
ER -