Rutile-type TiO2 thin films quasi-epitaxial grown by sputter deposition

Hiroki Takao, Hidekazu Miyajima, Kengo Mouri, Toru Miyoshi, Makoto Arita, Masataka Masuda

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    1 Citation (Scopus)


    Titanium dioxide (TiO2) has been known as a photocatalyst. It is generally said the photocatalytic activity of anatase phase is superior to that of rutile phase despite the difference in the conditions of preparation for these two phases. We prepared anatase and rutile thin films under the same deposition conditions by reactive magnetron sputtering with Quasi-Epitaxial Growth (QEG) and discussed the relationship between the photocatalitic activity and the conditions of film deposition. An excellent photocatalytic performance was obtained for the rutile thin film prepared with QEG. With UV light illumination, QEG rutile exhibited a 0° contact angle with water as well as anatase and had better photo-decomposition activity than anatase. The photocatalytic activity of TiO2 thin films is strongly affected by deposition conditions.

    Original languageEnglish
    Pages (from-to)211-215
    Number of pages5
    JournalNippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
    Issue number3
    Publication statusPublished - Mar 2008

    All Science Journal Classification (ASJC) codes

    • Condensed Matter Physics
    • Mechanics of Materials
    • Metals and Alloys
    • Materials Chemistry


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