Recent development in quantitative electron diffraction for crystallography of materials

The present paper gives an extended review on applications of electron diffraction techniques to practical problems in materials science, such as (1) determination of structure factors and temperature factors by the critical voltage and intersecting Kikuchi line (IKL) methods, (2) measurement of local lattice parameters by convergent beam electron diffraction (CBED), (3) determination of partial degree of order in ternary alloys by IKL-ALCHEMI method, and (4) determination of structure factors by energy filtering CBED. The emphasis is placed on recent achievements of electron diffraction as a tool of quantitative crystallography of materials. Keywords: convergent beam electron diffraction, critical voltage effect, intersecting Kikuchi line method, atom location by channeling enhanced microanalysis, energy filtering, structure factor, lattice parameter, temperature factor, dynamical diffraction.