Realization of an atomically flat surface of diamond using dressed photon-phonon etching

Takashi Yatsui, Wataru Nomura, Makoto Naruse, Motoichi Ohtsu

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29 Citations (Scopus)


We obtained an atomically flat diamond surface following dressed photon-phonon (DPP) etching using 3.81eV light and O 2 gas. We obtained a surface roughness (R a) of 0.154nm for Ib-type (111) diamond and 0.096nm for Ib-type (100) diamond. To evaluate the surface roughness, we grouped the surface into bins of width l and introduced the standard deviation of the height difference function for a given separation l, which allowed us to determine the height variation of the surface. Based on the calculation of standard deviation, the conventional adiabatic photochemical reaction did not remove the small surface features, while DPP etching decreased the surface roughness for all length scales.

Original languageEnglish
Article number475302
JournalJournal of Physics D: Applied Physics
Issue number47
Publication statusPublished - Nov 28 2012
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films


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