We propose a modified version of pulsed laser deposition: rapid sequential pulsed laser deposition. In this method, different metal elements are sequentially deposited onto a substrate in a fixed stoichiometric ratio in a very short period of time. This method allows a flexible choice of target material and of laser power density, which may solve the particulate problem intrinsic to a conventional laser ablation. We show results of an in situ formation of YBa2Cu3O7 thin film as a demonstration of this method.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)