Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging

H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, S. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N. Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. FujimoriY. Ishisaki, U. Morita, T. Koga, K. Sato, T. Ohashi, Y. Kuroda, M. Onishi, K. Otake, F. Beppu

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


An X-ray microcalorimeter is a high performance X-ray spectrometer that can achieve both high energy resolution of conventional wavelength dispersive spectrometers (WDS) and high quantum efficiency of energy dispersive spectrometers (EDS). The energy resolution can be theoretically improved to about 1eV, which value is 120 times better than that of conventional Si(Li) spectrometers and nearly 100% of quantum efficiency can be achieved using microabsorbers. In order to realize high energy-resolution X-ray imaging using an array of X-ray microcalorimeters, two types of 2 × 2 X-ray microcalorimeter arrays were fabricated and tested. Using an X-ray microabsorber so-called "mushroom-shaped" X-ray microabsorber, the filling factor was enhanced to about 70%. We tested Sn and Bi as an X-ray microabsorber. Consequently, the Sn absorber degrades the energy resolution because of the long time constant. This problem was cleared using the Bi microabsorber. The achievable energy resolution was also investigated. As a result, the energy resolution of 6.3eV was obtained with the test device.

Original languageEnglish
Pages (from-to)171-175
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number2-3
Publication statusPublished - Sept 1 2004
Externally publishedYes
EventSelected Papers from Transducers 03 - Boston, MA, United States
Duration: Jun 8 2003Jun 12 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


Dive into the research topics of 'Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging'. Together they form a unique fingerprint.

Cite this