Progress with MEMS X-ray micro pore optics

Yuichiro Ezoea; Teppei Moriyama; Tomohiro Ogawa; Takuya Kakiuchi; Takaya Ohashi; Ikuyuki Mitsuishi; Kazuhisa Mitsuda; Mitsuhiro Horade; Susumu Sugiyama; Raul E. Riveros; Hitomi Yamaguchi; Yoshiaki Kanamori; Kohei Morishita; Kazuo Nakajima; Ryutaro Maeda

doi:10.1117/12.925811

Progress with MEMS X-ray micro pore optics

Yuichiro Ezoea, Teppei Moriyama, Tomohiro Ogawa, Takuya Kakiuchi, Takaya Ohashi, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Mitsuhiro Horade, Susumu Sugiyama, Raul E. Riveros, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.

Original language	English
Title of host publication	Space Telescopes and Instrumentation 2012
Subtitle of host publication	Ultraviolet to Gamma Ray
DOIs	https://doi.org/10.1117/12.925811
Publication status	Published - 2012
Externally published	Yes
Event	Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray - Amsterdam, Netherlands Duration: Jul 1 2012 → Jul 6 2012

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8443
ISSN (Print)	0277-786X

Other

Other	Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray
Country/Territory	Netherlands
City	Amsterdam
Period	7/1/12 → 7/6/12

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.925811

Cite this

Ezoea, Y., Moriyama, T., Ogawa, T., Kakiuchi, T., Ohashi, T., Mitsuishi, I., Mitsuda, K., Horade, M., Sugiyama, S., Riveros, R. E., Yamaguchi, H., Kanamori, Y., Morishita, K., Nakajima, K., & Maeda, R. (2012). Progress with MEMS X-ray micro pore optics. In Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray Article 84430U (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8443). https://doi.org/10.1117/12.925811

Ezoea, Y, Moriyama, T, Ogawa, T, Kakiuchi, T, Ohashi, T, Mitsuishi, I, Mitsuda, K, Horade, M, Sugiyama, S, Riveros, RE, Yamaguchi, H, Kanamori, Y, Morishita, K, Nakajima, K & Maeda, R 2012, Progress with MEMS X-ray micro pore optics. in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray., 84430U, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8443, Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, Amsterdam, Netherlands, 7/1/12. https://doi.org/10.1117/12.925811

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title = "Progress with MEMS X-ray micro pore optics",

abstract = "Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.",

author = "Yuichiro Ezoea and Teppei Moriyama and Tomohiro Ogawa and Takuya Kakiuchi and Takaya Ohashi and Ikuyuki Mitsuishi and Kazuhisa Mitsuda and Mitsuhiro Horade and Susumu Sugiyama and Riveros, {Raul E.} and Hitomi Yamaguchi and Yoshiaki Kanamori and Kohei Morishita and Kazuo Nakajima and Ryutaro Maeda",

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doi = "10.1117/12.925811",

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series = "Proceedings of SPIE - The International Society for Optical Engineering",

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AU - Ezoea, Yuichiro

AU - Moriyama, Teppei

AU - Ogawa, Tomohiro

AU - Kakiuchi, Takuya

AU - Ohashi, Takaya

AU - Mitsuishi, Ikuyuki

AU - Mitsuda, Kazuhisa

AU - Horade, Mitsuhiro

AU - Sugiyama, Susumu

AU - Riveros, Raul E.

AU - Yamaguchi, Hitomi

AU - Kanamori, Yoshiaki

AU - Morishita, Kohei

AU - Nakajima, Kazuo

AU - Maeda, Ryutaro

PY - 2012

Y1 - 2012

N2 - Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.

AB - Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.

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DO - 10.1117/12.925811

M3 - Conference contribution

AN - SCOPUS:84871749314

SN - 9780819491442

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Space Telescopes and Instrumentation 2012

T2 - Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray

Y2 - 1 July 2012 through 6 July 2012

ER -

Progress with MEMS X-ray micro pore optics

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